柔性封裝機(jī)器人
柔性封裝機(jī)器人是專(zhuān)用的自動(dòng)封裝設(shè)備，主要針對(duì)MEMS（Micro Electro Mechanical systems的縮寫(xiě)，即微電子機(jī)械系統(tǒng)）應(yīng)用于小批量、多品種傳感器的自動(dòng)封裝而研制開(kāi)發(fā)，可針對(duì)各傳感器特點(diǎn)，通過(guò)夾具的柔性設(shè)計(jì)完成不同類(lèi)型傳感器的封裝。
Flexible Encapsulation Robot is an exclusive Automatic Encapsulation Equipment. It aims at MEMS( Micro Electro Mechanical Systems) and is developed and applied to the Auto-Encapsulation of small lot and various kinds of sensors. It encapsulates various kinds of sensors with the flexible design of fixtures according the characeristic of sensors
1、應(yīng)用領(lǐng)域：MEMS產(chǎn)業(yè)發(fā)展特點(diǎn)是小批量、多品種，柔性封裝機(jī)器人適應(yīng)多種MEMS傳感器的封裝。Application area: Small lot and various categories is the characteristic of MEMS industry. The Flexible Encapsulation Robot is adopted to kinds of MEMS sensor encapsulation.
2、關(guān)鍵技術(shù) Key Technology
1)自動(dòng)定位：采用自動(dòng)變倍顯微鏡實(shí)現(xiàn)大范圍、高精度位置測(cè)量。解決了變倍自動(dòng)調(diào)焦、顯微圖像分割等關(guān)鍵問(wèn)題，可實(shí)現(xiàn)柔性封裝前的自動(dòng)定位；Auto-positioning: apply the auto-zooming microscope to realize the large-scale and high accurate position measurement. Figure out the key question of zooming auto-facusing and micro image segmentation. Realize the auto-positioning before the encapsulation.
2)定位精度高：采用精密步進(jìn)電機(jī)驅(qū)動(dòng)，可實(shí)現(xiàn)定位精度5μm；High accuracy of positioning: driven by the accurate stepper motor ; 5μm high accurate positioning.
3)溫度控制范圍寬、控制著精度高：接合工藝爐采用基于PID調(diào)節(jié)技術(shù)的溫度控制方式，可實(shí)現(xiàn)0-500度范圍內(nèi)的溫度調(diào)整和控制。Wide scale of temperature control and high accuracy control: the combiner applys the PID-based adjusting technology, tuning and controling the temperature within 0~500°C.
4)人機(jī)界面友好：基于計(jì)算機(jī)控制方式，實(shí)現(xiàn)全部節(jié)拍的安排、動(dòng)作的設(shè)置和信息的采集，提供良好的人機(jī)界面。Friendly Human-computer interface: Base on the computer control; carry out the all beats scheduling, motion setup and information collocting; provide friendly human computer interface.
3、功能：將精密定位、顯微視覺(jué)、作業(yè)工具等關(guān)鍵技術(shù)有機(jī)結(jié)合，通過(guò)模塊化設(shè)計(jì)，可根據(jù)需求有效集成，滿足不同封裝要求。Function: combining organically the key technology of accurate positioning, mircro visual and operating tools, adopting the modular design, different encapsolation requires are satisfied according effetive intergration.
4、實(shí)際應(yīng)用 Practical Application
（1）、已實(shí)現(xiàn)MEMS高溫壓力傳感器自動(dòng)化組裝作業(yè)。MEMS high-temperature pressure sensor auto-encapsulation has been realized
（2）、實(shí)現(xiàn)加速度計(jì)、微麥克風(fēng)等傳感器的引線鍵合封裝。Accelerometer and tiny microphone sensors’ lead bonding encapsulation has been realized
5、樣機(jī)照片 Product sample
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